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Proceedings Paper

Scribing blue LED wafer using laser-induced plasma-assisted ablation with a Q-switched Nd:YAG laser
Author(s): JongMoo Lee; Jun-Ho Jang; Tae-Kyung Yoo
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Paper Abstract

Transparent materials, such as sapphire, are found to be scribed and cut freely by sparks form metal surface on which q-switched Nd:YAG laser beam is focused through the transparent materials. This method is successfully applied to split each device for a blue LED wafer including about ten thousands of blue LEDs grown on a sapphire wafer.

Paper Details

Date Published: 7 June 2000
PDF: 8 pages
Proc. SPIE 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V, (7 June 2000); doi: 10.1117/12.387560
Show Author Affiliations
JongMoo Lee, LGIS Research & Development Ctr. (South Korea)
Jun-Ho Jang, LG Corporate Institute of Technology (South Korea)
Tae-Kyung Yoo, LG Corporate Institute of Technology (South Korea)


Published in SPIE Proceedings Vol. 3933:
Laser Applications in Microelectronic and Optoelectronic Manufacturing V
Henry Helvajian; Koji Sugioka; Malcolm C. Gower; Jan J. Dubowski, Editor(s)

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