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Proceedings Paper

KrF-excimer-laser-induced ohmic metallization of ZnO substrate
Author(s): Toshimitsu Akane; Koji Sugioka; Katsumi Midorikawa
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Paper Abstract

A non-alloy ohmic contact is fabricate on hydrothermally grown n-type ZnO substrate by KrF excimer laser pre- irradiation and metal deposition. The laser irradiation breaks Zn-O bonding, and turns ZnO surface layer to Zn-rich one which has lower sheet resistance than that of bulk, and has n-type conduction. The Zn-rich pre-metallized layer enables current conducting into ZnO substrate with ohmic characteristics. Au/In/ZnOx and In/ZnOx contact fabricated by single pulse laser irradiation has specific contact resistivity of approximately 7 X 10-1 (Omega) cm2. Deterioration of contact resistance is confirmed after 5 minutes annealing at 300 degrees C in N2, which is originated by re-bonding of Zn-O in laser irradiated area.

Paper Details

Date Published: 7 June 2000
PDF: 7 pages
Proc. SPIE 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V, (7 June 2000); doi: 10.1117/12.387558
Show Author Affiliations
Toshimitsu Akane, RIKEN--The Institute of Physical and Chemical Research (Japan)
Koji Sugioka, RIKEN--The Institute of Physical and Chemical Research (Japan)
Katsumi Midorikawa, RIKEN--The Institute of Physical and Chemical Research (Japan)


Published in SPIE Proceedings Vol. 3933:
Laser Applications in Microelectronic and Optoelectronic Manufacturing V
Henry Helvajian; Koji Sugioka; Malcolm C. Gower; Jan J. Dubowski, Editor(s)

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