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Proceedings Paper

Laser ablation of solid films at a cryogenic temperature
Author(s): Hiroyuki Niino; Tadatake Sato; Akira Yabe
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Paper Abstract

In order to create new possibilities of laser ablation technique, the laser ablation of nitrogen solid films deposited on a copper plate at 10 K was performed upon irradiation with a picosecond UV laser in vacuum. UV and visible emissions, which were ascribed to the transition form excited molecular and atomic nitrogen, were detected on the film during the laser irradiation at the fluence of 5 J/cm2/pulse. These excited species would be produced in a multi-photon absorption process of the nitrogen by the ps- laser irradiation. At the fluence of ca. 10 J/cm2/pulse, ablation of the film was observed. Plume of the ablation reacted with the surface of graphite. XPS analysis indicated that nitrides formed don the graphite surface by the exposure to the plume. A novel technique for surface modification of materials is made possible by the ps-laser ablation of nitrogen solid film.

Paper Details

Date Published: 7 June 2000
PDF: 8 pages
Proc. SPIE 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V, (7 June 2000); doi: 10.1117/12.387553
Show Author Affiliations
Hiroyuki Niino, National Institute of Materials and Chemical Research (Japan)
Tadatake Sato, National Institute of Materials and Chemical Research (Japan)
Akira Yabe, National Institute of Materials and Chemical Research (Japan)


Published in SPIE Proceedings Vol. 3933:
Laser Applications in Microelectronic and Optoelectronic Manufacturing V
Henry Helvajian; Koji Sugioka; Malcolm C. Gower; Jan J. Dubowski, Editor(s)

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