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Proceedings Paper

Increasing the optical coupling efficiency of planar photodetectors: electron beam writing of an integrated microlens array on top of an MSM device
Author(s): Antonio Carlos Seabra; F. G. Araes; Murilo Araujo Romero; Luiz Goncalves Neto; Bahram Nabet
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Paper Abstract

In this paper we describe the fabrication of an array of integrated cylindrical microlenses on top of a single GaAs MSM photodetector. Experimental data shows an increase of about 65% on the photocurrent of the MSM photodiode as a result of the improved optical coupling efficiency.

Paper Details

Date Published: 24 May 2000
PDF: 5 pages
Proc. SPIE 4089, Optics in Computing 2000, (24 May 2000); doi: 10.1117/12.386781
Show Author Affiliations
Antonio Carlos Seabra, Univ. of Sao Paulo (Brazil)
F. G. Araes, Univ. of Sao Paulo (Brazil)
Murilo Araujo Romero, Univ. of Sao Paulo (Brazil)
Luiz Goncalves Neto, Univ. of Sao Paulo (Brazil)
Bahram Nabet, Drexel Univ. (United States)


Published in SPIE Proceedings Vol. 4089:
Optics in Computing 2000

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