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Proceedings Paper

Displacement measurement using phase-shifting optical feedback interferometry
Author(s): Thierry M. Bosch; Noel Servagent; Marc Lescure
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Paper Abstract

A laser sensor using optical feedback interferometry has been designed to measure displacements up to several micrometers. For this purpose a Lithium Niobate crystal generates a phase-shift in order to modulate at a frequency of 580 kHz the optical path difference between the sensor and the target. This setup has been calibrated by means of a commercial optical fiber sensor. The overall accuracy resulted to be up to 40 nm, for a 1 kHz sinusoidal motion of the target at 10 cm away from the sensor.

Paper Details

Date Published: 22 May 2000
PDF: 10 pages
Proc. SPIE 4072, Fourth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (22 May 2000); doi: 10.1117/12.386733
Show Author Affiliations
Thierry M. Bosch, Ecole des Mines de Nantes (France)
Noel Servagent, Ecole des Mines de Nantes (France)
Marc Lescure, Ecole des Mines de Nantes (France)


Published in SPIE Proceedings Vol. 4072:
Fourth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications
Enrico Primo Tomasini, Editor(s)

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