Share Email Print
cover

Proceedings Paper

Laser Doppler method for mode identification on micro-oscillators
Author(s): Joseph F. Vignola; Scot F. Morse; Xiao Liu; Lidija Sekaric; Brian H. Houston; Douglas M. Photiadis
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The mechanical motion of a new class of micro-mechanical devices, known as micro electro-mechanical systems oscillators, is examined using the laser Doppler technique. Currently, experimental methods based on capacitance, induction, and Fabry-Perot interferometry are used to find resonance frequencies and to establish quality factors or Q's. The technique described in this paper is capable of distinguishing mode shapes, yielding calibrated displacements, and revealing the existence of flexural modes, in addition to finding resonance frequencies and establishing Q's as the other techniques do. Because full- field laser vibrometry measurements provide an understanding of the modal composition of the systems, it can be used to refine the design and construction of these devices.

Paper Details

Date Published: 22 May 2000
PDF: 12 pages
Proc. SPIE 4072, Fourth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (22 May 2000); doi: 10.1117/12.386724
Show Author Affiliations
Joseph F. Vignola, Naval Research Lab. (USA) and SFA, Inc. (United States)
Scot F. Morse, Naval Research Lab. (United States)
Xiao Liu, Naval Research Lab. (USA) and SFA, Inc. (United States)
Lidija Sekaric, Cornell Univ. (United States)
Brian H. Houston, Naval Research Lab. (United States)
Douglas M. Photiadis, Naval Research Lab. (United States)


Published in SPIE Proceedings Vol. 4072:
Fourth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications
Enrico Primo Tomasini, Editor(s)

© SPIE. Terms of Use
Back to Top