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Proceedings Paper

Comparison of ANOVA and Latin square measurement system analysis techniques
Author(s): John A. Allgair
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Paper Abstract

Measurement system analysis is essential for determining the quality of data used for process control. Analysis of variation, or ANOVA, is a commonly used technique for measurement system analysis. Recently, the Advanced Metrology Advisory Group at SEMATECH has proposed using the Latin Square technique for determining the reproducibility and repeatability of a CD SEM. Advantages and disadvantages of the two techniques will be discussed.

Paper Details

Date Published: 2 June 2000
PDF: 4 pages
Proc. SPIE 3998, Metrology, Inspection, and Process Control for Microlithography XIV, (2 June 2000); doi: 10.1117/12.386540
Show Author Affiliations
John A. Allgair, Motorola (United States)


Published in SPIE Proceedings Vol. 3998:
Metrology, Inspection, and Process Control for Microlithography XIV
Neal T. Sullivan, Editor(s)

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