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Proceedings Paper

Automatic system for integrated reliability test on silicon pressure sensor
Author(s): Yunhui Wang; Dexing Yi; Qingzhong Xiao; Shanci Wang
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Paper Abstract

This paper introduces a newly developed automatic system for reliability test of silicon pressure sensor. This system performs two functions: the dynamic cycling life test and the static parameter calibration of pressure sensors. This system makes it possible that the reliability test be carried through under the integrated stresses of temperature, electricity and dynamic pressure. And the failure pressure cycling times of each test samples can be determined accurately. All the static parameters of pressure sensors can be measured automatically and precisely by this system. Test results of some pressure sensors were presented.

Paper Details

Date Published: 9 May 2000
PDF: 5 pages
Proc. SPIE 4077, International Conference on Sensors and Control Techniques (ICSC 2000), (9 May 2000); doi: 10.1117/12.385613
Show Author Affiliations
Yunhui Wang, China Electronic Product Reliability and Environmental Test Institute (China)
Dexing Yi, China Electronic Product Reliability and Environmental Test Institute (China)
Qingzhong Xiao, China Electronic Product Reliability and Environmental Test Institute (China)
Shanci Wang, China Northeast Transducer Technology Research Institute (China)


Published in SPIE Proceedings Vol. 4077:
International Conference on Sensors and Control Techniques (ICSC 2000)
Desheng Jiang; Anbo Wang, Editor(s)

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