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Proceedings Paper

XRD analysis on ZnO and Au film crystal orientation in ZnO/Au/SiO2 structure
Author(s): Huibin Qin; Hong Yu; Yunxang Chen
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Paper Abstract

The orientation of the Zn/Au/Si structure was examined by XRD. The experiment showed that the ZnO/Au/Si films deposited by magnetron sputtering were possessed of a preferred orientation in C axis perpendicular to the film surface. The (111) of Au film was possessed of a preferred <111> orientation which was perpendicular to the film surface also. The XRD (theta) approximately 2 (theta) scan irradiated that there were only (001) peaks in excellent orientated ZnO films. The rock cure scan demonstrated that the C axis of ZnO film was not exactly perpendicular to the surface, the angular divergence was about 2 degree(s), and the space divergence angle about 1.5 degree(s). Expert the (kkk) main peaks of Au film there were weak diffraction peaks, such as (002), (022), and (311) peaks. The phenomena indicated that in Au film there was not only (111) plane in parallel to the surface of substrate. As there was only 12% dis-matching between Au (111) and ZnO (001), the Au (111) oriented film was facilitated for the ZnO (001) orientation in C axis and deposing parameters adjustment.

Paper Details

Date Published: 9 May 2000
PDF: 4 pages
Proc. SPIE 4077, International Conference on Sensors and Control Techniques (ICSC 2000), (9 May 2000); doi: 10.1117/12.385536
Show Author Affiliations
Huibin Qin, Hangzhou Institute of Electronic Engineering (China)
Hong Yu, 52nd Institute of Information Industry Ministry (China)
Yunxang Chen, 26th Institute of Information Industry Ministry (China)


Published in SPIE Proceedings Vol. 4077:
International Conference on Sensors and Control Techniques (ICSC 2000)

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