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Proceedings Paper

Photoelements of blue-purple
Author(s): Hetai Li; Haiqing Dong; Zhiwu Cui
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Paper Abstract

The fabrication processes of the photoelement using Si planar technology and the ion implantation method are described in this paper. The phototriodes with high amplification coefficient are produced by controlling the time and the temperature of diffusion. Some samples are tested with JT-1 type transistor characteristic graphic instrument and the photoelectric spectrophotometer. It is found that the breakdown voltage and the amplification coefficient are very good, and the response to homogeneous light, especially to the light of 515 nm, is consonant with the demands.

Paper Details

Date Published: 9 May 2000
PDF: 3 pages
Proc. SPIE 4077, International Conference on Sensors and Control Techniques (ICSC 2000), (9 May 2000); doi: 10.1117/12.385526
Show Author Affiliations
Hetai Li, Shenyang Polytechnic Univ. (China)
Haiqing Dong, Shenyang Polytechnic Univ. (China)
Zhiwu Cui, Shenyang Polytechnic Univ. (China)

Published in SPIE Proceedings Vol. 4077:
International Conference on Sensors and Control Techniques (ICSC 2000)
Desheng Jiang; Anbo Wang, Editor(s)

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