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Proceedings Paper

Miniaturized tin oxide (SnOx) sensor by using oxygen-plasma-treated thin film technique
Author(s): Kun Lian; Zhong Geng Ling; Jiechao Jiang
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Paper Abstract

A new processing technique for thin film tin oxide gas sensor has been described in this paper. Oxygen plasma is used as film sensitizing tool, in which the temperature only goes up to 190 degree(s)C for a short time. By using this technique, the tin oxide thin film sensors with smooth, uniform surface have been made with a reasonable sensitivity to the CO gas at room temperature. The oxygen plasma treatment decreases both film resistivity and film grain size. This new technique makes the tin oxide sensor fabrication compatible with the microelectronic processing.

Paper Details

Date Published: 9 May 2000
PDF: 8 pages
Proc. SPIE 4077, International Conference on Sensors and Control Techniques (ICSC 2000), (9 May 2000); doi: 10.1117/12.385525
Show Author Affiliations
Kun Lian, Louisiana State Univ. (United States)
Zhong Geng Ling, Louisiana State Univ. (United States)
Jiechao Jiang, Louisiana State Univ. (United States)

Published in SPIE Proceedings Vol. 4077:
International Conference on Sensors and Control Techniques (ICSC 2000)
Desheng Jiang; Anbo Wang, Editor(s)

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