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Proceedings Paper

Thickness and refractivity computation in ellipsometry measurement by genetic algorithm
Author(s): Zilong Peng; Zuoyi Li; Yu Hu; Liguo Tang; Xiaofei Yang
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Paper Abstract

The principle of ellipsometry measurement and the foundation of the ellipsoidal equation were detailedly described, and the genetic algorithm was introduced to the calculation for refractivity and thickness of film, which ameliorates the astringency and the convergent speed. Emphatically discussed the designation of genetic operators according to the computing program flow chart.

Paper Details

Date Published: 9 May 2000
PDF: 4 pages
Proc. SPIE 4077, International Conference on Sensors and Control Techniques (ICSC 2000), (9 May 2000); doi: 10.1117/12.385519
Show Author Affiliations
Zilong Peng, Huazhong Univ. of Science and Technology (China)
Zuoyi Li, Huazhong Univ. of Science and Technology (China)
Yu Hu, Huazhong Univ. of Science and Technology (China)
Liguo Tang, Huazhong Univ. of Science and Technology (China)
Xiaofei Yang, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 4077:
International Conference on Sensors and Control Techniques (ICSC 2000)
Desheng Jiang; Anbo Wang, Editor(s)

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