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Proceedings Paper

Delta-doped CCDs with integrated UV coatings
Author(s): Peter W. Deelman; Shouleh Nikzad; Morley M. Blouke
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Paper Abstract

We have established our ability to deposit filters and coatings directly on delta-doped CCDs by constructing a metal/insulator molecular-beam epitaxy (MBE) chamber connected via an ultra-high-vacuum transfer line to the silicon MBE chamber, in which delta-doping is performed. We have fabricated preliminary MgF2 AR coatings on delta- doped SITe CCDs.

Paper Details

Date Published: 15 May 2000
PDF: 5 pages
Proc. SPIE 3965, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications, (15 May 2000); doi: 10.1117/12.385471
Show Author Affiliations
Peter W. Deelman, Jet Propulsion Lab. CIT (United States)
Shouleh Nikzad, Jet Propulsion Lab. CIT (United States)
Morley M. Blouke, Scientific Imaging Technologies, Inc. (United States)


Published in SPIE Proceedings Vol. 3965:
Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications
Morley M. Blouke; Nitin Sampat; Thomas Yeh; Nitin Sampat; George M. Williams; Thomas Yeh, Editor(s)

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