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Proceedings Paper

High-throughput optimizations of alloy and doped films based on ZnO and parallel synthesis of ZnO/MgxZN1-xO quantum wells using combinatorial laser MBE toward ultraviolet laser
Author(s): Akira Ohtomo; Takayuki Makino; Kentaro Tamura; Yuji Matsumoto; Yusaburo Segawa; ZiKang Tang; George K.L. Wong; Hideomi Koinuma; Masashi Kawasaki
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Paper Abstract

We report high-throughput optimizations for various material parameters of Mg,Zn1-xO and Zn1-xCdxO alloy films, Al-doped ZnO films, MgxZn1-xO/ZnO single quantum wells and superlattice structures with using combinatorial laser MBE. Combinatorial chips including nine thin film pixels were grown on lattice-matched ScAlMgO4 (0001) substrates by switching the mask patterns and targets during pulsed laser deposition.

Paper Details

Date Published: 17 May 2000
PDF: 12 pages
Proc. SPIE 3941, Combinatorial and Composition Spread Techniques in Materials and Device Development, (17 May 2000); doi: 10.1117/12.385415
Show Author Affiliations
Akira Ohtomo, Tokyo Institute of Technology (Japan)
Takayuki Makino, RIKEN-The Institute of Physical and Chemical Research (Japan)
Kentaro Tamura, Tokyo Institute of Technology (Japan)
Yuji Matsumoto, Tokyo Institute of Technology (Japan)
Yusaburo Segawa, RIKEN-The Institute of Physical and Chemical Research (Japan)
ZiKang Tang, Hong Kong Univ. of Science & Technology (Hong Kong)
George K.L. Wong, Hong Kong Univ. of Science & Technology (Hong Kong)
Hideomi Koinuma, Tokyo Institute of Technology and Japan Science and Technology Corp. (Japan)
Masashi Kawasaki, Tokyo Institute of Technology (Japan)


Published in SPIE Proceedings Vol. 3941:
Combinatorial and Composition Spread Techniques in Materials and Device Development
Ghassan E. Jabbour, Editor(s)

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