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Proceedings Paper

Aluminum-hollow fiber delivery system for excimer lasers
Author(s): Yuji Matsuura; Takashi Yamamoto; Mitsunobu Miyagi
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Paper Abstract

Hollow fibers for transmitting high-power ArF-excimer laser light are fabricated by Metal Organic Chemical Vapor Deposition method. The hollow fibers with the inner diameter of 1 mm are fabricated by depositing an aluminum film on the inside of silica glass capillary by employing dimethylethylamine alane as the precursor. The fibers shows low-loss property, high durability, and high-energy threshold with the radiation of excimer lasers.

Paper Details

Date Published: 3 May 2000
PDF: 6 pages
Proc. SPIE 3911, Biomedical Diagnostic, Guidance, and Surgical-Assist Systems II, (3 May 2000); doi: 10.1117/12.384916
Show Author Affiliations
Yuji Matsuura, Tohoku Univ. (Japan)
Takashi Yamamoto, Tohoku Univ. (Japan)
Mitsunobu Miyagi, Tohoku Univ. (Japan)

Published in SPIE Proceedings Vol. 3911:
Biomedical Diagnostic, Guidance, and Surgical-Assist Systems II
Tuan Vo-Dinh; Warren S. Grundfest; David A. Benaron, Editor(s)

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