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Proceedings Paper

Fabrication and testing of polyimide thermo-optic switches
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Paper Abstract

CMOS compatible optical polyimide based thermo-optic switches have the potential use as low-power switches. These switches would have many advantages over other switches based on inorganic crystals. For one, they can be integrated into module-to-module systems using currently available VLSI fabrication techniques. Polyimide based, 1 by 2 thermo-optic switches are fabricated onto silicon wafers and tested. We report the properties and characteristics of digital thermo- optic switches designed to operate at 1.3 micrometers . Also, the switching characteristics at different heating electrode voltages are tested and compared.

Paper Details

Date Published: 27 April 2000
PDF: 6 pages
Proc. SPIE 3952, Optoelectronic Interconnects VII; Photonics Packaging and Integration II, (27 April 2000); doi: 10.1117/12.384402
Show Author Affiliations
John Martin Taboada, Univ. of Texas/Austin (United States)
Dechang An, Univ. of Texas/Austin (United States)
Zan Shi, Radiant Research, Inc. (United States)
Jeffery J. Maki, Radiant Research, Inc. (United States)
Suning Tang, Radiant Research, Inc. (United States)
Ray T. Chen, Univ. of Texas/Austin (United States)

Published in SPIE Proceedings Vol. 3952:
Optoelectronic Interconnects VII; Photonics Packaging and Integration II
Michael R. Feldman; Richard Liqiang Li; Michael R. Feldman; Richard Liqiang Li; W. Brian Matkin; Suning Tang, Editor(s)

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