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Proceedings Paper

Processing and optical properties of Nd3+-doped SiO2-TiO2-Al2O3 planar waveguides
Author(s): Qing Xiang; Yan Zhou; Boon Siew Ooi; Yee Loy Lam; Yuen Chuen Chan; Chan Hin Kam
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Paper Abstract

We report here the processing and optical characterization of Nd3+-doped SiO2-TiO2-Al2O3 planar waveguides deposited on SOS substrates by the sol-gel route combined with spin-coating and rapid thermal annealing. The recipes used for preparing the solutions by sol-gel route are in mole ratio of 93SiO2:20AlO1.5: x ErO1.5. In order to verify the residual OH content in the films, FTIR spectra were measured and the morphology of the material by the XRD analysis. Five 2-layer films annealed at a maximum temperature of 500 degrees C, 700 degrees C, 900 degrees, 1000 degrees C, 1100 degrees C respectively were fabricated on silicon. The FTIR and XRD curves show that annealing at 1050 degrees C for 15s effectively removes the OH in the materia and keeps the material amorphous. The propagation loss of the planar waveguides was measured by using the method based on scattering in measurements and the result was obtained to be 1.54dB/cm. The fluorescence spectra were measured with 514nm wavelength of Ar+ laser by directly shining the pump beam on the film instead of prism coupling. The results show that the 1 mole Nd3+ content recipe has the strongest emission efficiency among the four samples investigated.

Paper Details

Date Published: 2 May 2000
PDF: 6 pages
Proc. SPIE 3943, Sol-Gel Optics V, (2 May 2000); doi: 10.1117/12.384355
Show Author Affiliations
Qing Xiang, Nanyang Technological Univ. (Singapore)
Yan Zhou, Nanyang Technological Univ. (Singapore)
Boon Siew Ooi, Nanyang Technological Univ. (Singapore)
Yee Loy Lam, Nanyang Technological Univ. (Singapore)
Yuen Chuen Chan, Nanyang Technological Univ. (Singapore)
Chan Hin Kam, Nanyang Technological Univ. (Singapore)

Published in SPIE Proceedings Vol. 3943:
Sol-Gel Optics V
Bruce S. Dunn; Edward J. A. Pope; Helmut K. Schmidt; Masayuki Yamane, Editor(s)

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