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Proceedings Paper

3D profilometry by analysis of noisy white-light interferograms
Author(s): Seok-moon Ryoo; Tae-Sun Choi
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Paper Abstract

Using a white-light interference for high-precision surface structure analysis, 3D profilometry is realized. White-light surface profilers record the position of peak fringe contrast modulating the optical path difference of an imaging interferometer. This method is sensitive to random noise, such as spike or missing data points, which can be interpreted as positions of high fringe contrast. In order to overcome this problem, a median filter is employed for noise reduction of the acquired profile. Interferograms are generated simultaneously by scanning an object in a direction perpendicular to the object surface. These interferograms are filtered by the median filter, the surface height for each point of the image is obtained by finding the position of peak fringe contrast by extended depth from focus. It is shown in the experiment that the proposed method is able to cope with distortions of the fringe contrast envelope of noisy white-light interferograms without smoothing peak fringe contrast and distorting the position of peak. Moreover, the computation becomes fast and simple by using the advanced algorithm, which does not use complex spatial frequency domain processing.

Paper Details

Date Published: 2 May 2000
PDF: 9 pages
Proc. SPIE 3919, Three-Dimensional and Multidimensional Microscopy: Image Acquisition Processing VII, (2 May 2000); doi: 10.1117/12.384190
Show Author Affiliations
Seok-moon Ryoo, Kwangju Institute of Science and Technology (South Korea)
Tae-Sun Choi, Kwangju Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 3919:
Three-Dimensional and Multidimensional Microscopy: Image Acquisition Processing VII
Jose-Angel Conchello; Carol J. Cogswell; Andrew G. Tescher; Tony Wilson, Editor(s)

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