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Proceedings Paper

Optical characterization of microfabricated solid immersion lenses
Author(s): Daniel A. Fletcher; Kenneth B. Crozier; Kenneth E. Goodson; Calvin F. Quate; Gordon S. Kino
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Paper Abstract

Circumventing the optical diffraction limit is important for data storage, photolithography, and imaging. The Solid Immersion Lens (SIL), in which light is focussed through a high refractive-index lens held close to a sample, offers a method for improving resolution. Microfabrication of SILs enables the use of lenses as small as a few wavelengths in diameter. When these are integrated onto cantilevers, the SIL can be scanned over topography with control of lens- sample separation. We have extended Mie theory to investigate aberration in small lenses and the effect of lens size on a converging beam. We also report progress on the fabrication and first results from micromachined silicon SILs.

Paper Details

Date Published: 2 May 2000
PDF: 9 pages
Proc. SPIE 3919, Three-Dimensional and Multidimensional Microscopy: Image Acquisition Processing VII, (2 May 2000); doi: 10.1117/12.384184
Show Author Affiliations
Daniel A. Fletcher, Stanford Univ. (United States)
Kenneth B. Crozier, Stanford Univ. (United States)
Kenneth E. Goodson, Stanford Univ. (United States)
Calvin F. Quate, Stanford Univ. (United States)
Gordon S. Kino, Stanford Univ. (United States)

Published in SPIE Proceedings Vol. 3919:
Three-Dimensional and Multidimensional Microscopy: Image Acquisition Processing VII
Jose-Angel Conchello; Carol J. Cogswell; Andrew G. Tescher; Tony Wilson, Editor(s)

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