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Proceedings Paper

Fabrication of freely movable microstructures by using two-photon three-dimensional microfabrication
Author(s): Shoji Maruo; Koji Ikuta
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Paper Abstract

We report the latest 3D fabrication system based on two- photon-initiated polymerization. In two-photon 3D microfabrication, 3D microstructures can be made by scanning an ultrashort-pulsed near-IR laser beam inside liquid photopolymer without layer-by-layer process. Our current system has achieved lateral and depth resolutions of 0.2 micrometers and 0.28 micrometers , respectively. Movable micromechanisms, i.e., microgears, can be also fabricated without any use of supporting parts. For instance, a microgear with an attached shaft was successfully fabricated. Rotation of a microgear was verified during washing out unsolidified photopolymer.

Paper Details

Date Published: 17 April 2000
PDF: 7 pages
Proc. SPIE 3937, Micro- and Nano-photonic Materials and Devices, (17 April 2000); doi: 10.1117/12.382800
Show Author Affiliations
Shoji Maruo, Nagoya Univ. (Japan)
Koji Ikuta, Nagoya Univ. (Japan)

Published in SPIE Proceedings Vol. 3937:
Micro- and Nano-photonic Materials and Devices
Joseph W. Perry; Axel Scherer, Editor(s)

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