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Proceedings Paper

Diode-pumped DUV cw all-solid-state laser to replace argon ion lasers
Author(s): Ekhard Zanger; B. Liu; Wolfgang Gries
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Paper Abstract

The slim series DELTATRAINTM--worldwide the first integrated cw diode-pumped all-solid-state DUV laser at 266 nm with a compact, slim design--has been developed. The slim design minimizes the DUV DPSSL footprint and thus greatly facilitates the replacement of commonly used gas ion lasers, including these with intra-cavity frequency doubling, in numerous industrial and scientific applications. Such a replacement will result in an operation cost reduction by several thousands US$DLR each year for one unit. Owing to its unique geometry-invariant frequency doubling cavity- based on the LAS patent-pending DeltaConcept architecture-- this DUV laser provides excellent beam-pointing stability of <2 (mu) rad/ degree(s)C and power stability of <2%. The newest design of the cavity block has adopted a cemented resonator with each component positioned precisely inside a compact monolithic metal block. The automatic and precise crystal shifter ensures long operation lifetime of > 5000 hours of whole 266 nm laser. The microprocessor controlled power supply provides an automatic control of the whole 266 nm laser, making this DUV laser a hands-off system which can meet tough requirements posed by numerous industrial and scientific applications. It will replace the commonplace ion laser as the future DUV laser of choice.

Paper Details

Date Published: 14 April 2000
PDF: 8 pages
Proc. SPIE 3929, Solid State Lasers IX, (14 April 2000); doi: 10.1117/12.382752
Show Author Affiliations
Ekhard Zanger, Laser Analytical Systems GmbH (Germany)
B. Liu, Laser Analytical Systems GmbH (Germany)
Wolfgang Gries, Laser Analytical Systems GmbH (Germany)

Published in SPIE Proceedings Vol. 3929:
Solid State Lasers IX
Richard Scheps, Editor(s)

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