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Proceedings Paper

Anodic oxidation in polysilicon microactuators
Author(s): Pierre Voumard; Patrick Debergh; G. Perregaux; S. Gonseth
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Paper Abstract

Many polysilicon devices, like comb-drives, micromotors, valves, accelerometers, micromirrors or microshutters use electrostatic forces for their actuation. Electrostatic forces increases with the square of the inverse of the distance between electrodes. Due to this favorable scaling law, electrostatic actuation is interesting for microsystems.

Paper Details

Date Published: 10 April 2000
PDF: 2 pages
Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); doi: 10.1117/12.382327
Show Author Affiliations
Pierre Voumard, Swiss Ctr. for Electronics and Microtechnology, Inc. (Switzerland)
Patrick Debergh, Swiss Ctr. for Electronics and Micrelectronics, Inc. (Switzerland)
G. Perregaux, Swiss Ctr. for Electronics and Micrtechnology, Inc. (Switzerland)
S. Gonseth, Swiss Ctr. for Electronics and Microtechnology, Inc. (Switzerland)


Published in SPIE Proceedings Vol. 4019:
Design, Test, Integration, and Packaging of MEMS/MOEMS
Bernard Courtois; Selden B. Crary; Kaigham J. Gabriel; Jean Michel Karam; Karen W. Markus; Andrew A. O. Tay, Editor(s)

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