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Proceedings Paper

Array of niobium nanotips formed in porous anodic alumina matrix
Author(s): Victor F. Surganov; G. G. Gorokh
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Paper Abstract

New fabrication method of nanoscale regular tips for vacuum microelectronics basing on electrochemical anodizing double- layer systems aluminum-niobium in aqueous acid electrolyte has been developed. This method allows providing very small overall emitted size and high uniform packaging densities without lithography and etching technique. Electron field emission from array of niobium nanotips formed in porous anodic alumina matrix has been investigated.

Paper Details

Date Published: 10 April 2000
PDF: 5 pages
Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); doi: 10.1117/12.382321
Show Author Affiliations
Victor F. Surganov, Belarusian State Univ. of Informatics and Radioelectronics (Belarus)
G. G. Gorokh, Belarusian State Univ. of Informatics and Radioelectronics (Belarus)


Published in SPIE Proceedings Vol. 4019:
Design, Test, Integration, and Packaging of MEMS/MOEMS
Bernard Courtois; Selden B. Crary; Kaigham J. Gabriel; Jean Michel Karam; Karen W. Markus; Andrew A. O. Tay, Editor(s)

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