Share Email Print

Proceedings Paper

High-level fault modeling in surface-micromachined MEMS
Author(s): Nilmoni Deb; Ronald D. Shawn Blanton
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

MEMS structures rendered defective by particles are modeled a tthe scehamtic-level using existing models of fault-free MEMS primitives within the nodal simulator NODAS. We have compared the results of schematic-level fault simulations with low-level finite element analysis and demonstrated the efficacy of such an approach. Analysis shows that NODAS achieves a 60X speedup over FEA with little accuracy loss in modeling defects caused by particles.

Paper Details

Date Published: 10 April 2000
PDF: 8 pages
Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); doi: 10.1117/12.382298
Show Author Affiliations
Nilmoni Deb, Carnegie Mellon Univ. (United States)
Ronald D. Shawn Blanton, Carnegie Mellon Univ. (United States)

Published in SPIE Proceedings Vol. 4019:
Design, Test, Integration, and Packaging of MEMS/MOEMS
Bernard Courtois; Selden B. Crary; Kaigham J. Gabriel; Jean Michel Karam; Karen W. Markus; Andrew A. O. Tay, Editor(s)

© SPIE. Terms of Use
Back to Top