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Proceedings Paper

High-level fault modeling in surface-micromachined MEMS
Author(s): Nilmoni Deb; Ronald D. Shawn Blanton
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Paper Abstract

MEMS structures rendered defective by particles are modeled a tthe scehamtic-level using existing models of fault-free MEMS primitives within the nodal simulator NODAS. We have compared the results of schematic-level fault simulations with low-level finite element analysis and demonstrated the efficacy of such an approach. Analysis shows that NODAS achieves a 60X speedup over FEA with little accuracy loss in modeling defects caused by particles.

Paper Details

Date Published: 10 April 2000
PDF: 8 pages
Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); doi: 10.1117/12.382298
Show Author Affiliations
Nilmoni Deb, Carnegie Mellon Univ. (United States)
Ronald D. Shawn Blanton, Carnegie Mellon Univ. (United States)


Published in SPIE Proceedings Vol. 4019:
Design, Test, Integration, and Packaging of MEMS/MOEMS
Bernard Courtois; Selden B. Crary; Kaigham J. Gabriel; Jean Michel Karam; Karen W. Markus; Andrew A. O. Tay, Editor(s)

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