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Proceedings Paper

Efficient reduced order modeling for system simulation of micro-electro-mechanical systems (MEMS) from FEM models
Author(s): Bachar Affour; Philippe Nachtergaele; Stevan Spirkovitch; Dale Ostergaard; Miklos P. Gyimesi
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Paper Abstract

System designers need access to high-fidelity behavioral models in order to simulate system of MEMS, electronics and packaging. Therefore, the need exists to create behavioral models that provide accurate harmonic and time-domain solutions in a fast and efficient manner. In the MEMSCAP MEMS design suite, the EDD family of tools enables the generation of non-linear dynamic behavioral models from models with a hierarchically lower level of abstraction or measured data. In this paper, we report on a new module of EDD, the ANSYS ModelBuilder, which is embedded in the ANSYS Multi-physics tool set. The module reduces the dimensionality of FEM models built in ANSYS and writes them in popular modeling languages such as HDL-A, SPICE, VHDL-AMS and Verilog-A. We illustrate the capabilities of our new tool by utilizing it to develop two system level examples and compare the results to the full 3D descriptions.

Paper Details

Date Published: 10 April 2000
PDF: 5 pages
Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); doi: 10.1117/12.382297
Show Author Affiliations
Bachar Affour, MEMSCAP S.A. (France)
Philippe Nachtergaele, MEMSCAP S.A. (France)
Stevan Spirkovitch, MEMSCAP S.A. (France)
Dale Ostergaard, ANSYS Inc. (United States)
Miklos P. Gyimesi, ANSYS Inc. (United States)


Published in SPIE Proceedings Vol. 4019:
Design, Test, Integration, and Packaging of MEMS/MOEMS
Bernard Courtois; Selden B. Crary; Kaigham J. Gabriel; Jean Michel Karam; Karen W. Markus; Andrew A. O. Tay, Editor(s)

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