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Proceedings Paper

CFD-Micromesh: a fast geometric modeling and mesh generation tool for 3D microsystem simulations
Author(s): Zhiqiang Tan; M. Furmanczyk; Marek Turowski; Andrzej J. Przekwas
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Paper Abstract

In this work, a new fully automated geometrical modeling and meshing tool is described. It imports standard layout formats, images, and 3D boundary representations s. A 3D model is then generated by simulating 3D operations specified by the process data or the user. A 3D finite element mesh with tagged boundary and volume conditions is then automatically created. The automatic generation of 3D model and mesh takes typically a couple of minutes on a current PC machine. The paper will present the geometry/meshing engines, user interfaces, and will demonstrate them on a range of microsystem applications.

Paper Details

Date Published: 10 April 2000
PDF: 7 pages
Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); doi: 10.1117/12.382289
Show Author Affiliations
Zhiqiang Tan, CFD Research Corp. (United States)
M. Furmanczyk, CFD Research Corp. (United States)
Marek Turowski, CFD Research Corp. (United States)
Andrzej J. Przekwas, CFD Research Corp. (United States)


Published in SPIE Proceedings Vol. 4019:
Design, Test, Integration, and Packaging of MEMS/MOEMS
Bernard Courtois; Selden B. Crary; Kaigham J. Gabriel; Jean Michel Karam; Karen W. Markus; Andrew A. O. Tay, Editor(s)

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