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Proceedings Paper

1-GHz CMOS VCO design for wireless application using MEMS technology
Author(s): Amal Mohamed; Hamed Elsimary; Mohammed Ismail
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Paper Abstract

In this work, the design of RF VCO circuit, in which the oscillation frequency is controlled by a tunable capacitor based on microelectromechanical system (MEMS) technology is presented. The design of high Q-MEMS tunable capacitor has been accomplished through bulk micro machining with all metal micro structure. A standard CMOS process is used to carry out the fabrication of the VCO circuit with the MEMS tunable capacitor on the same chip. The main features of this design, is the enabling of a complete monolithic fabrication RF VCOs using on-chip IC compatible high-Q MEMS tunable capacitor. The performance of the MEMS capacitor is modeled with emphasis on the tunability range with the tuning voltage. The simulation results are presented to show the performance of RF VCO circuit with the MEMS tunable capacitor, which has a high-Q of about 60 at 1 GHZ and low insertion loss of -1dB at 40 GHz.

Paper Details

Date Published: 10 April 2000
PDF: 5 pages
Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); doi: 10.1117/12.382284
Show Author Affiliations
Amal Mohamed, The Ohio State Univ. (United States)
Hamed Elsimary, The Ohio State Univ. (United States)
Mohammed Ismail, The Ohio State Univ. (United States)

Published in SPIE Proceedings Vol. 4019:
Design, Test, Integration, and Packaging of MEMS/MOEMS
Bernard Courtois; Selden B. Crary; Kaigham J. Gabriel; Jean Michel Karam; Karen W. Markus; Andrew A. O. Tay, Editor(s)

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