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Proceedings Paper

Mathematical modeling on the quadrature error of low-rate microgyroscope for aerospace applications
Author(s): Bao Y. Yeh; Yung C. Liang; Francis E.H. Tay
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Paper Abstract

This paper reports on the mathematical modeling on the quadrature error of a micro gyroscope due to the imbalance of the flexures. Quadrature error occurs when the proof mass of a micro gyroscope oscillates along an axis that is not exactly parallel to the X-axis. The asymmetric spring flexures due to manufacturing variation can cause the proof mass to rotate when a force acts on the proof mass. The mathematical mode is verified using finite element software, Intellicad and found to have a good agreement with the simulation results for angles of rotation of comb fingers below 5.26 degrees. The mathematical model provides a new avenue of approach in solving the quadrature error problem and in saving the overall simulation time. The spring constant of the fishhook flexure can be calculated form Castigliano's energy theorem and substituted into the mathematical mode to find out the size of the quadrature error. The sensitivity of a fishhook flexure to its dimensions is analyzed.

Paper Details

Date Published: 10 April 2000
PDF: 11 pages
Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); doi: 10.1117/12.382274
Show Author Affiliations
Bao Y. Yeh, National Univ. of Singapore (Singapore)
Yung C. Liang, National Univ. of Singapore (Singapore)
Francis E.H. Tay, National Univ. of Singapore (Singapore)

Published in SPIE Proceedings Vol. 4019:
Design, Test, Integration, and Packaging of MEMS/MOEMS
Bernard Courtois; Selden B. Crary; Kaigham J. Gabriel; Jean Michel Karam; Karen W. Markus; Andrew A. O. Tay, Editor(s)

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