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Proceedings Paper

Compliant MEMS: design methods and applications
Author(s): Sridhar Kota
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Paper Abstract

A systematic method of synthesis of monolithic mechanical structures called compliant mechanisms is presented. Sophisticated mechanical functions can be realized with these mechanisms and their unitized construction eliminates joint friction, clearances, and the need for assembly.

Paper Details

Date Published: 10 April 2000
PDF: 1 pages
Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); doi: 10.1117/12.382272
Show Author Affiliations
Sridhar Kota, Univ. of Michigan (United States)


Published in SPIE Proceedings Vol. 4019:
Design, Test, Integration, and Packaging of MEMS/MOEMS
Bernard Courtois; Selden B. Crary; Kaigham J. Gabriel; Jean Michel Karam; Karen W. Markus; Andrew A. O. Tay, Editor(s)

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