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Proceedings Paper

Design, fabrication, and packaging of closed-chamber PCR chips for DNA amplification
Author(s): Christian G. J. Schabmueller; Alan G. R. Evans; Arthur Brunnschweiler; Graham J. Ensell; Dario L. Leslie; M. A. Lee
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Paper Abstract

This paper reports the design, fabrication and packaging of a micro machined silicon/Pyrex based chip for the polymerase chain reaction. Anodic bonding is used for sealing the chambers of 1 (mu) l volume with a Pyrex glass wafer. Platinum resistors on the back of the wafer are used as heaters and temperature sensors. The chip is externally cooled by forced air to achieve rapid temperature cycling. The transparency of the Pyrex makes it possible for using optical readout methods. The packaging is especially designed for easy handling, filling, power connection, temperature regulation and optical readout. The mass production of such silicon reactors could make single-shot, disposable devices economically viable.

Paper Details

Date Published: 10 April 2000
PDF: 8 pages
Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); doi: 10.1117/12.382271
Show Author Affiliations
Christian G. J. Schabmueller, Univ. of Southampton (United Kingdom)
Alan G. R. Evans, Univ. of Southampton (United Kingdom)
Arthur Brunnschweiler, Univ. of Southampton (United Kingdom)
Graham J. Ensell, Univ. of Southampton (United Kingdom)
Dario L. Leslie, Defence Evaluation and Research Agency Porton Down (United Kingdom)
M. A. Lee, Defence Evaluation and Research Agency Porton Down (United Kingdom)


Published in SPIE Proceedings Vol. 4019:
Design, Test, Integration, and Packaging of MEMS/MOEMS

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