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Proceedings Paper

Silicon micro-electro-mechanical systems for millimeter-wave applications
Author(s): Katia M. Grenier; Patrick Pons; T. Parra; Robert Plana; Jacques Graffeuil
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Paper Abstract

A new fully silicon MEM technology and design methodology is introduced to realize millimeter-wave applications such as switches. It is based on two kinds of micro-machining techniques: a bulk micro-machines used to realize micro-wave circuits on a suspended membrane in order to decrease losses, and a surface micro-machining to make air-bridges actuable by electrostatic force. A MEM bridge electrical model has been investigated and implemented in the design of distributed switches.

Paper Details

Date Published: 10 April 2000
PDF: 8 pages
Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); doi: 10.1117/12.382269
Show Author Affiliations
Katia M. Grenier, Lab. d'Analyse et d'Architecture des Systemes (France)
Patrick Pons, Lab. d'Analyse et d'Architecture des Systemes (France)
T. Parra, Lab. d'Analyse et d'Architecture des Systemes (France)
Robert Plana, Lab. d'Analyse et d'Architecture des Systemes (France)
Jacques Graffeuil, Lab. d'Analyse et d'Architecture des Systemes (France)


Published in SPIE Proceedings Vol. 4019:
Design, Test, Integration, and Packaging of MEMS/MOEMS
Bernard Courtois; Selden B. Crary; Kaigham J. Gabriel; Jean Michel Karam; Karen W. Markus; Andrew A. O. Tay, Editor(s)

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