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Proceedings Paper

Microactuated optical MEMS
Author(s): Hiroyuki Fujita
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Paper Abstract

Optical scanners and switches are presented as examples of microactuated optical devices. Also a 3D chip-level packaging technique that is capable of optical, mechanical and electronic connections is discussed.

Paper Details

Date Published: 10 April 2000
PDF: 1 pages
Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); doi: 10.1117/12.382261
Show Author Affiliations
Hiroyuki Fujita, Univ. of Tokyo (Japan)


Published in SPIE Proceedings Vol. 4019:
Design, Test, Integration, and Packaging of MEMS/MOEMS

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