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Proceedings Paper

High-performance polyimide waveguide array with micromirror coupler for guided-wave optoelectronic interconnects
Author(s): Yujie Liu; Lei Lin; Chulchae Choi; Ray T. Chen
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Paper Abstract

We report the formation of high-performance polyimide waveguide arrays with 45 degree(s) micro mirror coupler fabricated at each end, which provides a high-efficiency output or input surface-normal light couple for the waveguide. This fully embedded integration provides an efficient method of optical interconnection for the board-level data communication and the multi-layer connection. We employed the Si CMOS process compatible polyimide as the fabrication material, which is relatively easy to process and has low propagation loss for light at 850 nm wavelength. A 1 X 12 waveguide array with 45 degree(s) micro mirror coupler fabricated at each end is experimentally demonstrated.

Paper Details

Date Published: 19 April 2000
PDF: 10 pages
Proc. SPIE 3950, Optoelectronic Integrated Circuits IV, (19 April 2000); doi: 10.1117/12.382164
Show Author Affiliations
Yujie Liu, Univ. of Texas/Austin (United States)
Lei Lin, Univ. of Texas/Austin (United States)
Chulchae Choi, Univ. of Texas/Austin (United States)
Ray T. Chen, Univ. of Texas/Austin (United States)

Published in SPIE Proceedings Vol. 3950:
Optoelectronic Integrated Circuits IV
Yoon-Soo Park; Ray T. Chen, Editor(s)

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