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Proceedings Paper

Self-mixing interferometry for distance and displacement measurement by Fourier transform method
Author(s): Ming Wang; Takahiko Sato; Guanming Lai; Shigenobu Shinohara
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Paper Abstract

A compact optical sensor for the measurement of distance and displacement has been developed by using the self-mixing effect of a laser diode. Although the principle of self-mixing interference is different from conventional interference, it is shown that FFT analysis technique can also be used to detect the signal phase and increase the measurement precision of self-mixing interferometry. The optical phase of self- mixing interference is detected by FFT analysis, and the phase error caused by the laser frequency fluctuation was reduced by using a reference reflector. By these techniques, we can determine the distance from centimeters to a few meters and the displacement with nanometer precision.

Paper Details

Date Published: 29 March 2000
PDF: 8 pages
Proc. SPIE 3945, Laser Diodes and LEDs in Industrial, Measurement, Imaging, and Sensors Applications II; Testing, Packaging, and Reliability of Semiconductor Lasers V, (29 March 2000); doi: 10.1117/12.380549
Show Author Affiliations
Ming Wang, Shizuoka Univ. (Japan)
Takahiko Sato, Shizuoka Univ. (Japan)
Guanming Lai, Shizuoka Univ. (Japan)
Shigenobu Shinohara, Shizuoka Univ. (Japan)


Published in SPIE Proceedings Vol. 3945:
Laser Diodes and LEDs in Industrial, Measurement, Imaging, and Sensors Applications II; Testing, Packaging, and Reliability of Semiconductor Lasers V
Geoffrey T. Burnham; Xiaoguang He; Kurt J. Linden; S. C. Wang; S. C. Wang; Geoffrey T. Burnham, Editor(s)

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