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Proceedings Paper

Multi-degree-of-freedom displacement measurement system using a diffraction grating
Author(s): Jong-Ahn Kim; Kyung-Chan Kim; Eui Won Bae; Soo Hyun Kim; Yoon Keun Kwak
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Paper Abstract

Multi-degree-of-freedom (MDOF) displacement measurement systems are needed in many application fields; precision machine control, precision assembly, vibration analysis, and so on. This paper presents a new MDOF displacement measurement system that is composed of a laser diode (LD), two position- sensitive detectors (PSDs), and a conventional diffraction grating. It utilizes typical features of a diffraction grating to obtain the information of MDOF displacement. MDOF displacement is calculated from the independent coordinate values of the diffracted ray spots on the PSDs. Forward and inverse kinematic problems were solved to compute the MDOF displacement of an object. Experimental results show maximum absolute errors of less than plus or minus 10 micrometers in translation and plus or minus 30 arcsecs in rotation.

Paper Details

Date Published: 29 March 2000
PDF: 8 pages
Proc. SPIE 3945, Laser Diodes and LEDs in Industrial, Measurement, Imaging, and Sensors Applications II; Testing, Packaging, and Reliability of Semiconductor Lasers V, (29 March 2000); doi: 10.1117/12.380531
Show Author Affiliations
Jong-Ahn Kim, Korea Advanced Institute of Science and Technology (South Korea)
Kyung-Chan Kim, Korea Advanced Institute of Science and Technology (South Korea)
Eui Won Bae, Korea Advanced Institute of Science and Technology (South Korea)
Soo Hyun Kim, Korea Advanced Institute of Science and Technology (South Korea)
Yoon Keun Kwak, Korea Advanced Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 3945:
Laser Diodes and LEDs in Industrial, Measurement, Imaging, and Sensors Applications II; Testing, Packaging, and Reliability of Semiconductor Lasers V
Geoffrey T. Burnham; S. C. Wang; Geoffrey T. Burnham; Xiaoguang He; Kurt J. Linden; S. C. Wang, Editor(s)

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