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Proceedings Paper

Recent advances in laser micromachining
Author(s): William A. Beck
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Paper Abstract

Laser micro-machining offers the ability to cut more complex patterns with less damage to delicate materials than competing approaches. Here we review recent progress in laser micromachining of piezoelectrically active PZTs, ferroelectric single crystal perovskites, and laser applications to high density electrical interconnect problems; the methods discussed here have broad application to the development of devices down to the MEMS scale.

Paper Details

Date Published: 20 March 2000
PDF: 14 pages
Proc. SPIE 4002, Saratov Fall Meeting '99: Laser Physics and Spectroscopy, (20 March 2000); doi: 10.1117/12.380098
Show Author Affiliations
William A. Beck, MicroSound Systems (United States)


Published in SPIE Proceedings Vol. 4002:
Saratov Fall Meeting '99: Laser Physics and Spectroscopy
Vladimir L. Derbov; Leonid A. Melnikov; Vladimir P. Ryabukho, Editor(s)

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