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Proceedings Paper

Design of an interferometer for the measurement of long radius optics
Author(s): Sen Han; Joseph A. Lamb; Artur G. Olszak; Erik Novak
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Paper Abstract

Veeco Metrology has designed, built and installed at the California Institute of Technology an interferometer for testing long radius optics for LIGO (Laser Interferometer Gravitational-Wave Observatory). Its accuracy is better than (lambda) /100 P-V for focus and astigmatism coefficients and (lambda) /1000 RMS for the residual surface. Its repeatability is better than (lambda) /4000 RMS with retrace error below 6 nm P-V with 4 fringes of tilt. ROC (radius of curvature) measurement error is less than 3%. In this paper we outline the requirements for the interferometer and discuss more challenging aspects of both the optical design and the alignment. Some measurement results are also presented.

Paper Details

Date Published: 21 March 2000
PDF: 8 pages
Proc. SPIE 3966, Machine Vision Applications in Industrial Inspection VIII, (21 March 2000); doi: 10.1117/12.380092
Show Author Affiliations
Sen Han, Veeco Instruments Inc. (United States)
Joseph A. Lamb, Roper Scientific (United States)
Artur G. Olszak, Veeco Instruments Inc. (United States)
Erik Novak, Veeco Instruments Inc. (United States)


Published in SPIE Proceedings Vol. 3966:
Machine Vision Applications in Industrial Inspection VIII
Kenneth W. Tobin Jr.; John C. Stover, Editor(s)

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