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Proceedings Paper

Scanning projection grating moire topography
Author(s): Jung-Taek Oh; SangYoon Lee; Seung-Woo Kim
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Paper Abstract

One problem with moire topography for 3D surface metrology is the so-called 2(pi) -ambiguity limiting the maximum step height difference between two neighboring samples points to be less than half the equivalent wavelength of moire fringes. To cope with the ambiguity problem, a special scheme of scanning moire technique is proposed by resorting to the frequency domain fringe analysis that is in fact originated from white light scanning interferometry. This new more principle of 3D measurement allows determining the absolute height of the surface without information on absolute fringe orders so that largely stepped surfaces are measured with a great improvement in accuracy.

Paper Details

Date Published: 16 March 2000
PDF: 6 pages
Proc. SPIE 3958, Three-Dimensional Image Capture and Applications III, (16 March 2000); doi: 10.1117/12.380054
Show Author Affiliations
Jung-Taek Oh, Korea Advanced Institute of Science and Technology (South Korea)
SangYoon Lee, Korea Advanced Institute of Science and Technology (South Korea)
Seung-Woo Kim, Korea Advanced Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 3958:
Three-Dimensional Image Capture and Applications III
Brian D. Corner; Joseph H. Nurre, Editor(s)

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