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Proceedings Paper

Effect of SiO2 cladding on properties of annealed proton-exchanged LiNbO3 waveguides
Author(s): Yuri N. Korkishko; Vyacheslav A. Fedorov; Oksana Y. Feoktistova; Tamara V. Morozova; Evgenii M. Paderin
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Paper Abstract

We show that SiO2 cladding effects on optical properties of annealed proton-exchanged (APE) LiNbO3 waveguides as well as on kinetic of annealing process. Annealing with previously deposited SiO2 film reduces the optical losses in APE LiNbO3 waveguides. The structural phase diagram of HxLi1-xNbO3 is also modified if annealing is performed with previously deposited SiO2 layer. The physical mechanisms, including evaporation of H2O and/or Li2O during annealing without deposited film and, as a result, formation of defects and lithium deficit phase is discussed.

Paper Details

Date Published: 24 March 2000
PDF: 8 pages
Proc. SPIE 3936, Integrated Optics Devices IV, (24 March 2000); doi: 10.1117/12.379946
Show Author Affiliations
Yuri N. Korkishko, Moscow Institute of Electronic Technology (Russia)
Vyacheslav A. Fedorov, Moscow Institute of Electronic Technology (Russia)
Oksana Y. Feoktistova, Moscow Institute of Electronic Technology (Russia)
Tamara V. Morozova, Moscow Institute of Electronic Technology (Russia)
Evgenii M. Paderin, Moscow Institute of Electronic Technology (Russia)


Published in SPIE Proceedings Vol. 3936:
Integrated Optics Devices IV
Giancarlo C. Righini; Seppo Honkanen, Editor(s)

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