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Proceedings Paper

Active and passive components of 3D integrated optics
Author(s): Christoph A. Waechter; Th. Bauer; Matthias Cumme; Peter Dannberg; Wilhelm Elflein; Thomas Henning; Ulrich Streppel; Wolfgang Karthe
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Paper Abstract

The potential of 3D integrated optics based on different technological schemes is investigated. Theoretical and experimental results for waveguide geometries with stacked waveguide layers and with waveguide circuits prepared on topological structures are reported as well. Within waveguide geometries including individual guides in a sequence of stacked layers directional coupler arrays allow for short length passive signal distribution, and various schemes of single and multipath switching can be identified. Cost effective preparation technologies as spin coating of polymer and PECVD of SiON layers and their patterning by UV- exposure or RIE, respectively, have been prove to fulfill the critical tolerance requirements of a simultaneous directional coupling in two transversal directions. To realize waveguides with smooth height variation gray scale lithography was used to produce topological surfaces. Upon those surfaces waveguide paths and devices can be defined subsequently, which are useful e.g. for non-planar to planar fan out structures or interferometer configurations for sensing applications. The topological surfaces can be replicated very efficiently by reaction molding, a technology widely used for micro-optical structures, too.

Paper Details

Date Published: 24 March 2000
PDF: 9 pages
Proc. SPIE 3936, Integrated Optics Devices IV, (24 March 2000); doi: 10.1117/12.379943
Show Author Affiliations
Christoph A. Waechter, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Th. Bauer, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Matthias Cumme, Friedrich-Schiller-Univ. Jena (Germany)
Peter Dannberg, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Wilhelm Elflein, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Thomas Henning, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Ulrich Streppel, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Wolfgang Karthe, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)


Published in SPIE Proceedings Vol. 3936:
Integrated Optics Devices IV
Giancarlo C. Righini; Seppo Honkanen, Editor(s)

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