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Proceedings Paper

Si-based integrated optical and photonic microstructures
Author(s): Matti J. Leppihalme; Timo T. Aalto; Pekka Katila; Paeivi Heimala; Martti Blomberg; Simo K. T. Tammela
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Paper Abstract

The design, fabrication and properties of various types of optical waveguides on silicon substrates as well as Fabry- Perot devices accomplished mainly at the Microelectronics Center of VTT Electronics are introduced. Different waveguides, directional couplers, multimode interference couplers, switches and power splitters have been studied. For waveguide fabrication on silicon substrates principally three materials were used depending on the application: silicon oxynitride, silicon on insulator (SOI). Silicon waveguides with large Si-core and a thermo-optical switch have been fabricated by SOI technology. Silicon Fabry-Perot structures have been fabricated for wavelength scanning applications in instrumentation and to measure chirp properties of lasers used in optical communications.

Paper Details

Date Published: 24 March 2000
PDF: 14 pages
Proc. SPIE 3936, Integrated Optics Devices IV, (24 March 2000); doi: 10.1117/12.379932
Show Author Affiliations
Matti J. Leppihalme, VTT Electronics (Finland)
Timo T. Aalto, VTT Electronics (Finland)
Pekka Katila, VTT Electronics (France)
Paeivi Heimala, VTT Electronics (Finland)
Martti Blomberg, VTT Electronics (Finland)
Simo K. T. Tammela, VTT Electronics (Finland)

Published in SPIE Proceedings Vol. 3936:
Integrated Optics Devices IV
Giancarlo C. Righini; Seppo Honkanen, Editor(s)

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