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Proceedings Paper

Long-range translation actuator
Author(s): Andrew P. Wallace; D. L. Howard; J. Marcos Sirota; Rosemary L. Smith; Scott D. Collins
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Paper Abstract

A long range translation actuator designed for optic and robotic applications is presented. Specifically, the microstage is designed to operate as the moving mirror in a miniature version of a traditional Michelson Fourier transform spectrometer. The translational microstage utilizes an electromagnetic actuation mechanism to realize linear translation of centimeters of precision travel. Motion is constrained in the normal and lateral directions using silicon dovetail microjoints. The electromagnetic actuation is based on macro linear synchronous motor design using a linear array of microcoils. Microcoils are arranged in a 3-phase configuration to enable both velocity and direction control. The electromagnetic force is characterized by finite element computer simulations to develop the input signal for translational travel at constant velocity. Optical position detection was used to measure the translation with time. Operation was demonstrated at various drive frequencies.

Paper Details

Date Published: 15 March 2000
PDF: 8 pages
Proc. SPIE 3912, Micro- and Nanotechnology for Biomedical and Environmental Applications, (15 March 2000); doi: 10.1117/12.379573
Show Author Affiliations
Andrew P. Wallace, Univ. of California/Davis (United States)
D. L. Howard, Univ. of California/Davis (United States)
J. Marcos Sirota, Joint Ctr. for Earth Systems Technology (United States)
Rosemary L. Smith, Univ. of California/Davis (United States)
Scott D. Collins, Univ. of California/Davis (United States)


Published in SPIE Proceedings Vol. 3912:
Micro- and Nanotechnology for Biomedical and Environmental Applications
Raymond P. Mariella Jr., Editor(s)

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