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Proceedings Paper

Recent advances in laser spallation technique for measurement of interfacial strength in thin films and multilayers (Abstract Only)
Author(s): Vijay Gupta
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Paper Abstract

Recent developments in the laser spallation technique to measure the tensile strength of thin film interfaces will be presented. In this technique, a laser-generated stress wave in the substrate pries off the coating deposited on its free surface. The interface strength is quantified by recording the free surface velocity of the coating using an interferometer. Examples from metal/ceramic, ceramic/oxide and polymer/semiconductor interface systems will be presented to demonstrate the ability of the technique to pick up strength changes resulting of interfacial adhesion. The sensitivity of the technique to pick up strength changes resulting from different processes and surface variables will be demonstrated. Potential application of the technique to measure the strength and reliability of interfaces in geometrically heterogeneous multilayer ICs and electronic substrate structures will also be discussed.

Paper Details

Date Published: 3 March 2000
PDF: 2 pages
Proc. SPIE 3902, Laser-Induced Damage in Optical Materials: 1999, (3 March 2000); doi: 10.1117/12.379332
Show Author Affiliations
Vijay Gupta, Univ. of California/Los Angeles (United States)


Published in SPIE Proceedings Vol. 3902:
Laser-Induced Damage in Optical Materials: 1999
Gregory J. Exarhos; Arthur H. Guenther; Mark R. Kozlowski; Keith L. Lewis; M. J. Soileau, Editor(s)

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