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Proceedings Paper

Scatter and absortion losses from DUV optics: a comparative study
Author(s): Oliver Apel; Klaus R. Mann
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Paper Abstract

DUV optical components are examined with respect to their optical losses at 193nm. Scattering and calorimetric absorption measurements were performed. The used calorimetric measurement setup allows absolute absorptance measurement with ppm resolution. By varying the energy density on the sample, linear as well as nonlinear absorptance can be determined. The total-scattering measurement setup allows the determination of both forward and backward scattering independently. We examined bare fused silica substrates, single layer coatings and thin film stacks. The obtained data give a detailed overview over the strength and the origins of the losses due to the different mechanisms for these optical components.

Paper Details

Date Published: 3 March 2000
PDF: 10 pages
Proc. SPIE 3902, Laser-Induced Damage in Optical Materials: 1999, (3 March 2000); doi: 10.1117/12.379312
Show Author Affiliations
Oliver Apel, Laser-Lab. Goettingen e.V. (Germany)
Klaus R. Mann, Laser-Lab. Goettingen e.V. (Germany)

Published in SPIE Proceedings Vol. 3902:
Laser-Induced Damage in Optical Materials: 1999
Gregory J. Exarhos; Arthur H. Guenther; Mark R. Kozlowski; Keith L. Lewis; M. J. Soileau, Editor(s)

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