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Proceedings Paper

Plume behavior and thin film deposition by laser ablation using a hellicoidal shadow mask
Author(s): Aurelian Marcu; Constantin Grigoriu; W. Jang; Kiyoshi Yatsui
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Paper Abstract

The laser ablation is one of the best ways to obtain smooth thin film deposited on various substrates. However, to obtain a 'droplets-free' surface some special experimental setups are necessary.ONe of them is the 'eclipse' method, using a plane shadow mask. Based on studies on the plume behavior in a 'standard' deposition and in a plane shadow mask eclipse deposition, we prose a new shadow mask having a an helicoidal shape, which permit to obtain a abetter film quality - maximum droplets size about 10 times smaller than for the plane shadow mask. The plume behavior and thin film quality are presented and discussed.

Paper Details

Date Published: 23 February 2000
PDF: 6 pages
Proc. SPIE 4068, SIOEL '99: Sixth Symposium on Optoelectronics, (23 February 2000); doi: 10.1117/12.378728
Show Author Affiliations
Aurelian Marcu, National Institute for Laser, Plasma and Radiation Physics (Romania)
Constantin Grigoriu, National Institute for Laser, Plasma and Radiation Physics (Romania)
W. Jang, Nagaoka Univ. of Technology (Japan)
Kiyoshi Yatsui, Nagaoka Univ. of Technology (Japan)


Published in SPIE Proceedings Vol. 4068:
SIOEL '99: Sixth Symposium on Optoelectronics

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