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Proceedings Paper

C-Ni multilayer reflectors: an AFM roughness study
Author(s): Magdalena Ulmeanu; G. Radu; P. Budau; Marius Enachescu
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Paper Abstract

Amorphous C-Ni superlattice films designed as normal- incidence reflector for 5 nm have been grown on quartz substrates by magnetron sputter deposition in Air discharge. An extended set of characterization techniques has been applied: Transmission Electron Microscopy (TEM) and Atomic Force Microscopy (AFM) in order to characterize the growth conditions. TEM measurements revealed information about the evolution of smoothness and the uniformity of the multilayer structure function of the distance of the substrate. A new DSP-controlled AFM system has been involved in investigating the surface topography of the final surface of the multilayer structure as well as the substrate. A new DSP- controlled AFM system has been involved in investigating the surface topography of the final surface of the multilayer structure as well as the substrate. A detailed analysis of AFM topographic images is presented. Special attention has been paid to an important parameter for such mirrors, the surface roughness, for nanometric and micrometric ares, invovling AFM tips with different radius of curvature. Roughness analysis as well as the implication of the different radius curvature tips use din AFM-contact experiments are presented together with the power spectral density function calculation.

Paper Details

Date Published: 23 February 2000
PDF: 7 pages
Proc. SPIE 4068, SIOEL '99: Sixth Symposium on Optoelectronics, (23 February 2000); doi: 10.1117/12.378714
Show Author Affiliations
Magdalena Ulmeanu, National Institute for Laser, Plasma and Radiation Physics (Romania)
G. Radu, National Institute for Laser, Plasma and Radiation Physics (Romania)
P. Budau, Univ. of Bucharest (Romania)
Marius Enachescu, Lawrence Berkeley National Lab. (United States)


Published in SPIE Proceedings Vol. 4068:
SIOEL '99: Sixth Symposium on Optoelectronics
Teodor Necsoiu; Maria Robu; Dan C. Dumitras, Editor(s)

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