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Proceedings Paper

Precision improvement in ellipsometric-type measurements for the refraction index using numerical code processing
Author(s): Andrei Belea; M. Bulinski
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Paper Abstract

Using a numerical code assisted data processing we show that the precision in the ellipsometric type measurements can be improved with a sufficient degree of confidence, up to an order of magnitude. Our method is based on fitting the experimental data with a pari of functions of known theoretical behavior. Essentially, we corroborate the result obtained from one strongly nonlinear function to those given by another behaving 'ultra-linearly'. When working with consistent experimental data, this procedure leads to a pair of 'outputs' that enhance one another producing an increased degree of precision. The paper explicitly applies this idea to an ellipsometric type measurement for the refraction index of a glass specimen.

Paper Details

Date Published: 23 February 2000
PDF: 6 pages
Proc. SPIE 4068, SIOEL '99: Sixth Symposium on Optoelectronics, (23 February 2000); doi: 10.1117/12.378697
Show Author Affiliations
Andrei Belea, Univ. of Bucharest (Romania)
M. Bulinski, Univ. of Bucharest (Romania)

Published in SPIE Proceedings Vol. 4068:
SIOEL '99: Sixth Symposium on Optoelectronics
Teodor Necsoiu; Maria Robu; Dan C. Dumitras, Editor(s)

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