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Proceedings Paper

Photoinduced growth of dielectrics with excimer lamps
Author(s): Ian W. Boyd; Jun-Ying Zhang
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Paper Abstract

Applications of photo-induced processes have over the years become essential technologies in several important industrial sectors. In this paper, the principles and properties of novel vacuum UV (VUV) and UV radiation generated by novel excimer sources are discussed. Compared with conventional sources, these excimers lamps offer narrow-band radiation at various wavelengths form 108-354 nm and over large areas. Since excimer complexes have no stable ground states self-absorption of the emitted radiation in the discharge is avoided. As a consequence, high efficiencies at high power densities can be achieved.

Paper Details

Date Published: 25 February 2000
PDF: 9 pages
Proc. SPIE 4070, ALT '99 International Conference on Advanced Laser Technologies, (25 February 2000); doi: 10.1117/12.378167
Show Author Affiliations
Ian W. Boyd, Univ. College London (United Kingdom)
Jun-Ying Zhang, Univ. College London (United Kingdom)


Published in SPIE Proceedings Vol. 4070:
ALT '99 International Conference on Advanced Laser Technologies
Vladimir I. Pustovoy; Vitali I. Konov, Editor(s)

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