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Proceedings Paper

Experimental and theoretical study of dual-crossed-beam pulsed laser deposition
Author(s): Michel L. Autric; Laetitia Lambert; Tatiana Itina
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Paper Abstract

Pulsed laser ablation appears as a promising technique for depositing thin films. A large variety of successful experimental results were obtained in this field, including the growth of high-temperature superconducting films, ferroelectric films, oxides, semiconductors, diamonds, etc. One of the main advantages of this technology is the relative simplicity of the experimental set-up and the possibility to get good homogeneity, complex stoichiometry materials and well adhesive dense layers. The main drawback seems to be the production of macroparticles, their transfer to the growing film inducing inhomogeneity and roughness onto the surface, lowering the properties of the thin films. In a common configuration, the laser-generated flux is collected on a planar substrate positioned parallel to the irradiated surface. In order to improve the stoichiometry and the quality of the films, several modifications, like simultaneous generation of two plumes from different targets with different targets with different laser beams, were proposed. In this paper, we present some results concerning the production of cryolite thin films using the conventional pulsed laser deposition technique and the dual crossed beams pulsed laser deposition technique. Plasma plumes expanding in vacuum and interacting together are visualized. The different species ejected in the plumes are detected through narrow-band filters in order to determine their kinetic energies. The morphology and the composition of the films are compared with the thermal evaporation technique.

Paper Details

Date Published: 25 February 2000
PDF: 10 pages
Proc. SPIE 4070, ALT '99 International Conference on Advanced Laser Technologies, (25 February 2000); doi: 10.1117/12.378164
Show Author Affiliations
Michel L. Autric, Institut de Recherche sur les Phenomenes Hors-Equilibre (France)
Laetitia Lambert, Institut de Recherche sur les Phenomenes Hors-Equilibre (France)
Tatiana Itina, Institut de Recherche sur les Phenomenes Hors-Equilibre (United States)


Published in SPIE Proceedings Vol. 4070:
ALT '99 International Conference on Advanced Laser Technologies
Vladimir I. Pustovoy; Vitali I. Konov, Editor(s)

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