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Proceedings Paper

Excimer laser surface processing of Si3N4 and AlN
Author(s): L. Yaghdjian; Gilbert Vacquier; Andre Fabre; Michel L. Autric
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Paper Abstract

We report on the investigation of XeF excimer laser ablation of YNi2B2C target by energy selective time-of-flight mass spectrometry (ES-TOFMS). ES-TOFMS allows laser plume investigation by providing a direct measurement of the ions kinetic energy and, through the TOF measurement, their simultaneous mass identification. In particular, the composition and the kinetic energy of the emitted ions has been accomplished by means of TOF technique coupled with a 160 degrees electrostatic energy analyzer. The analysis of the charged species composition and kinetic energy has been performed at different laser fluences and in high vacuum conditions.

Paper Details

Date Published: 25 February 2000
PDF: 8 pages
Proc. SPIE 4070, ALT '99 International Conference on Advanced Laser Technologies, (25 February 2000); doi: 10.1117/12.378159
Show Author Affiliations
L. Yaghdjian, Institut de Recherche sur les Phenomenes Hors-Equilibre (France)
Gilbert Vacquier, Univ. de Provence (France)
Andre Fabre, Ecole Nationale Superieure d'Arts et Metiers (France)
Michel L. Autric, Institut de Recherche sur les Phenomenes Hors-Equilibre (France)


Published in SPIE Proceedings Vol. 4070:
ALT '99 International Conference on Advanced Laser Technologies

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